Low Pressure Plasma Systems

Aurora Low Pressure Plasma Systems are designed for customized surface treatment - cleaning, activation and coating with outstanding results.

To meet the industrial production requirements the Aurora systems are available in different sizes and with additional options. The systems vary from a table top unit - designed for small series production - to large chamber systems for the treatment of complex parts in the aerospace and automotive industry.

  • Aurora TT - Tabletop System

    Quartz chamber with 13.56 MHz RF inductively coupled plasma for surface activation and cleaning...
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  • Aurora Standard System

    Aluminum chamber with side wall capacitively coupled plasma for surface activation and cleaning...
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  • Aurora Plus - Standard System with PECVD Coating Option

    Aluminum chamber with side wall capacitively coupled plasma for surface activation and cleaning plus liquid flow control system...
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  • Aurora LC - Large Capacity System

    Aluminum chamber with capacitively coupled plasma for surface activation and cleaning...
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Contact

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